Deformable object`s e.g. lever, characteristics e.g. mechanical characteristics, measuring method for micro or nanofabrication process metrology field, involves resonance frequency of oscillator contacting object

摘要

The method involves placing an oscillator (14) e.g. lever, in contact with a deformable object (2), where the oscillator has a resonance frequency (f0), a mass (M) and a stiffness (K). The oscillator is oscillated at its resonance frequency. A resonance frequency (f0`) of the oscillator contacting the object is measured by determining a resonance curve of the oscillator by a synchronous detection, or by measuring an instantaneous resonance frequency of the oscillator between a position of non-contact of the oscillator with the object and a position of contact of the oscillator with the object. An independent claim is also included for a sensor for implementing a deformable object`s characteristics measuring method.