SPECIMEN HOLDER, SPECIMEN INSPECTION DEVICE, SPECIMEN INSPECTION METHOD, AND METHOD FOR MANUFACTURING SPECIMEN HOLDER

摘要

PROBLEM TO BE SOLVED: To provide a specimen holder, a specimen inspection device, a specimen inspection method, and a manufacturing method for the specimen holder capable of suitably observing or inspecting a specimen made of a cultured cell or the like.;SOLUTION: In the specimen holder 40, at least part of an opened specimen-holding surface 37a is formed of a film 32, a specimen cultured on a specimen-holding surface 37a of the film 32 can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the specimen 38 such as a cell can be observed or inspected in vitro. Especially, if an electron beam is used as the primary beam, the specimen in vitro can be suitably observed and inspected by an SEM. Because the specimen-holding surface 37a is open, a manipulator can access (touch or approach) the specimen, a stimulus can be given to the specimen by using the manipulator, and its reaction can also be observed and inspected.;COPYRIGHT: (C)2008,JPO&INPIT