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BACKUP PIN ARRANGEMENT POSITION DETERMINING APPARATUS, AND BACKUP UNIT FORMING APPARATUS AND SUBSTRATE TREATING DEVICE
BACKUP PIN ARRANGEMENT POSITION DETERMINING APPARATUS, AND BACKUP UNIT FORMING APPARATUS AND SUBSTRATE TREATING DEVICE
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机译:备用销布置位置确定装置,备用单元形成装置和基板处理设备
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摘要
PROBLEM TO BE SOLVED: To arrange backup pins with excellent balance by displaying an image showing the arrangement position of the backup pins.;SOLUTION: This backup pin arrangement position determining apparatus 70 causes a pin arrangement position information acquiring means to acquire information about pin arrangeable positions, and a protrusion position information acquiring means to acquire information about the position of a protrusion, and a pin arrangement position determining means determines the arrangement position of backup pins 22 on the basis of the information about pin arrangeable positions and the information about the position of the protrusion. Then, an image processing section 72 composites the image showing the arrangement of the backup pins 22 with the positional information of a mounting component M, and a liquid crystal monitor 40 can display a composite image composited by the image processing section 72. As this result, since the arrangement of the backup pins 22 can be confirmed with the liquid crystal monitor 40 the backup pins 22 can be arranged with excellent balance.;COPYRIGHT: (C)2008,JPO&INPIT
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