CAPACITIVE-COUPLED PLASMA CHAMBER, SHOWERHEAD STRUCTURE, METHOD OF MANUFACTURING SHOWERHEAD, AND METHOD OF NEWLY RECYCLING SHOWERHEAD

摘要

PROBLEM TO BE SOLVED: To provide a capacitive-coupled plasma chamber, a showerhead structure, a method of manufacturing a showerhead, and a method of newly reusing a showerhead.;SOLUTION: A showerhead is configured by a main body layer having a low electrical resistivity, and a silicon carbide layer coated on the main body layer. The showerhead can efficiently perform capacitive-coupling of RF energy in plasma. A method of manufacturing a showerhead is provided to dominantly reduce generation of speck particles. In addition, a method of reusing a showerhead is alternatively provided to considerably reduce a utilization cost of users.;COPYRIGHT: (C)2008,JPO&INPIT