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MANUFACTURING METHOD OF STRUCTURAL OBJECT HAVING LINEAR RECESSED STRUCTURE AND MANUFACTURING METHOD OF MOLD FOR NANO-IMPRINTING
MANUFACTURING METHOD OF STRUCTURAL OBJECT HAVING LINEAR RECESSED STRUCTURE AND MANUFACTURING METHOD OF MOLD FOR NANO-IMPRINTING
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机译:具有直线回弹结构的结构物体的制造方法和用于纳米压铸的模具制造方法
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摘要
PROBLEM TO BE SOLVED: To provide a manufacturing method of a structural object having a linear recessed structure capable of easily manufacturing the structural object corresponding to a skew angle in the production or the like of a magnetic recording medium, and a manufacturing method of a mold for nano-imprinting.;SOLUTION: The manufacturing method of the structural object having the linear recessed structure has a process for forming the linear recessed structure to the circular region in a substrate to be processed by a plurality of times of pressing operations by using the same mold or changing a mold at every pressing so that the angle of inclination of the straight line, which connects the pressing center points of the linear recessed structure formed by a plurality of times of pressing operations with respect to the right-handed rotary direction in the circular region becomes larger as separated from the center of the circle in the circular region.;COPYRIGHT: (C)2008,JPO&INPIT
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