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COMPARISON METHOD OF LIGHT INTENSITY DISTRIBUTION DATA OF DIFFRACTED/SCATTERED LIGHT, AND PARTICLE SIZE DISTRIBUTION MEASURING DEVICE
COMPARISON METHOD OF LIGHT INTENSITY DISTRIBUTION DATA OF DIFFRACTED/SCATTERED LIGHT, AND PARTICLE SIZE DISTRIBUTION MEASURING DEVICE
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机译:散射/散射光的光强分布数据与颗粒尺寸分布测量装置的比较方法
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摘要
PROBLEM TO BE SOLVED: To provide a comparison method capable of clarifying a difference numerically by enlarging the difference to the utmost in numerical values of indexes showing the difference, when comparing each intensity distribution data of diffracted/scattered light having a small difference.;SOLUTION: This method includes a process for irradiating laser light to a dispersed particle group, a process for acquiring light intensity distribution data having each detected light quantity data as a component by detecting diffracted/scattered light from the dispersed particle group by a plurality of photodetection elements, and a process for comparing each light intensity distribution data acquired respectively relative to two different dispersed particle groups. The comparison process includes a process for treating each light intensity distribution data as a vector having each detected light quantity data as components, and calculating an intersectional angle index related to an intersectional angle formed by the two light intensity distribution data emphatically by operating a weight matrix thereto; and a process for determining the degree of a difference between the two light intensity distribution data based on the intersectional angle index determined in the calculation process.;COPYRIGHT: (C)2008,JPO&INPIT
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