HIGH-FREQUENCY PROBE AND PROBE CARD

摘要

PPROBLEM TO BE SOLVED: To provide a high-frequency probe that is applied to a measuring probe card and maintains the impedance characteristic of a high-frequency electrometric signal. PSOLUTION: A measuring area 304 on an upper surface 301 of a circuit plate 301 is used for making electrical contact with a measuring bench. A test bench outputs an electrometric signal to a probe card 2, and a high-frequency electrometric signal is transmitted to an inner circumferential probe area 303. Electronic circuits disposed on the circuit plate 30 include a large number of signal circuits 31 and ground circuits 32 that are electrically connected to signal probes 50 and ground probes 60. Each of the signal circuits 31 is used for transmitting a high-frequency measuring signal, and is adjacent to a ground circuit 32 at a certain distance. Each of the ground circuits 32 can be electrically connected directly or indirectly to a reference potential point of the test bench, and can maintain the impedance characteristic of a high-frequency measuring signal that is transmitted by the signal circuit 31. PCOPYRIGHT: (C)2008,JPO&INPIT