CARTRIDGE TYPE COATING APPARATUS, CARTRIDGE TYPE COATING SYSTEM, METHOD OF CONTROLLING CARTRIDGE TYPE COATING APPARATUS AND METHOD OF CONTROLLING CARTRIDGE TYPE COATING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a cartridge type coating apparatus in which a coating material housing chamber is cleaned with a suppressed quantity of a cleaning liquid to be used for the cleaning of the coating material housing chamber, a cartridge type coating system, a method of controlling the cartridge type coating apparatus and a method of controlling the cartridge type coating system.;SOLUTION: The cartridge type coating system 11 is provided with the cartridge type coating apparatus 21 and a cleaning fluid filling apparatus 31 for filling the cleaning liquid and air to the coating material housing chamber of a cartridge 12. In the cartridge type coating apparatus 21, a coating action is carried out by attaching the cartridge 12 having the coating material housing chamber filled with the coating material to a coater 22 to coat a material W to be coated using a coating robot 23 and a cleaning action is carried out by attaching the cartridge 12 having the coating material housing chamber filled with the cleaning liquid and gas by the cleaning fluid filling apparatus 31 to the coater 22 and vibrating the cartridge 12 using the coating robot 23 to clean the coating material housing chamber.;COPYRIGHT: (C)2008,JPO&INPIT