ULTRASONIC TRANSDUCER CELL, ULTRASONIC TRANSDUCER ELEMENT, ULTRASONIC TRANSDUCER ARRAY AND ULTRASONIC DIAGNOSTIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an ultrasonic transducer cell capable of transmitting/receiving an ultrasonic wave of sufficient sound pressure while reducing a DC bias voltage, an ultrasonic transducer element, an ultrasonic transducer array and ultrasonic diagnostic apparatus.;SOLUTION: An ultrasonic transducer cell includes: a substrate; a charge holding portion provided on the substrate; a lower electrode provided on the charge holding portion and used to input and output a signal; and a vibration membrane provided above the lower electrode to be separated from the lower electrode with a cavity, and configured to include at least an insulating film and an upper electrode provided on the insulating film.;COPYRIGHT: (C)2008,JPO&INPIT