METHOD FOR REMOVING METAL IMPURITY IN BORON-BASED GAS

摘要

PROBLEM TO BE SOLVED: To provide a method for removing metal impurities in boron-based gas by which metal impurities present in boron-based gas can be reliably removed to obtain ultrahigh purity boron-based gas.;SOLUTION: Metal impurities such as iron, copper, aluminum, nickel, magnesium, chromium, manganese and zinc present in boron-based gas such as B₂H₆, BF₃ and BCl₃ is removed to obtain ultrahigh purity boron-based gas by filtering the boron-based gas through a stainless steel sintered filter or bringing the gas into contact with stainless steel powder.;COPYRIGHT: (C)2008,JPO&INPIT