SILICON THIN FILM, SILICON MONOCRYSTAL PARTICLE ASSEMBLAGE, SEMICONDUCTOR DEVICE AND FLASH MEMORY CELL

摘要

PROBLEM TO BE SOLVED: To provide a silicon thin film which allows silicon monocrystal particle assemblages with less particle diameter variation to be regularly placed on a base substance.;SOLUTION: A silicon thin film contains a silicon monocrystal particle assemblage with approximate rectangular silicon monocrystal particles placed in matrix on a base substance. In addition, more than 30% in the quantity of silicon monocrystal particles constituting the silicon monocrystal particle assemblage have {100} aspects for the base substance surface and its average film thickness is 1×10^-8m or 4×10^-8m.;COPYRIGHT: (C)2008,JPO&INPIT