METHOD OF MANUFACTURING INORGANIC ELECTROLUMINESCENT ELEMENT, INORGANIC ELECTROLUMINESCENT CRYSTALLIZED LUMINESCENT FILM, AND INORGANIC ELECTROLUMINESCENT ELEMENT EQUIPPED WITH IT

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an inorganic EL element having excellent blue light emitting performance, and to provide an inorganic EL crystallized luminescent film, and an inorganic EL element equipped with it.;SOLUTION: This method of manufacturing the inorganic EL element is provided with a pair of electrodes, a semiconductor film formed between the pair of electrodes, and this inorganic EL crystallized luminescent film formed on the semiconductor film and containing a host material represented by chemical formula M₂SiS₄: X (wherein M is an alkaline earth metal, and X is a rare-earth metal) and a rare-earth metal ions as a luminescent center added in the host material. The method of manufacturing the inorganic EL element comprises: a luminescent film formation process of forming a film containing the host material; a concentration adjustment material supplying process of supplying a material adjusting the concentration of X in the film containing the host material; and a heat treatment process of providing the inorganic EL crystallized luminescent film by respectively heat-treating the host material and the concentration adjustment material.;COPYRIGHT: (C)2008,JPO&INPIT