BASE ISOLATION DEVICE FOR PRECISION INSTRUMENT AND INSTALLATION STRUCTURE FOR PRECISION INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To provide a base isolation device effective for installing a precision instrument requiring anti-vibration performance, and an installation structure using the device.;SOLUTION: The base isolation device 4 is interposed between a fixed mount and the precision instrument so as to support the precision instrument such as a pulling-up machine 3 installed on the fixed mount 2 fixed to a floor surface 1 in the base isolating manner. The base isolation device comprises a steel mount 5 fixed to the bottom surface of the precision instrument, and laminated rubber 6 interposed and fixed between the steel mount and the fixed mount. The laminated rubber is concentrated on positions of four corners of the steel mount as a rectangular steel frame. A work floor 7 is disposed around the precision instrument supported and installed by the base isolation device in a base isolating manner, a base isolation clearance 8 is secured between the work floor and the precision instrument, and a buffer 9 restricting the excess horizontal displacement of the precision instrument is installed in the base isolation clearance.;COPYRIGHT: (C)2008,JPO&INPIT