DIRECTION MEASURING METHOD FOR ANISOTROPIC SPHERICAL MATERIAL, DIRECTION MEASURING DEVICE FOR ANISOTROPIC SPHERICAL MATERIAL, AND MANUFACTURING METHOD OF SPHERICAL ACOUSTIC SURFACE WAVE ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a direction measuring method of an anisotropic spherical material, a direction measuring device for the anisotropic spherical material, and a manufacturing method of a spherical acoustic surface wave element, capable of determining accurately a direction showing anisotropy, and manufacturing the highly-accurate spherical acoustic surface wave element by forming a thin-film structure at a specified proper position.;SOLUTION: An acoustic surface wave control means 12 can generate an acoustic surface wave propagating along a large circle on a plane vertical to a shaft, at a prescribed position on the surface of a spherical material 1 held by a manipulator 11b. The acoustic surface wave control means 12 can measure a prescribed physical quantity of the acoustic surface wave circulated along the large circle at a prescribed position. The elastic acoustic wave control means 12 is rotated, relative along the large circle on its periphery relative to the spherical material 1 held by the manipulator 11b, and generation of the acoustic surface wave and measurement of the physical quantity are repeated at each of a plurality of mutually different rotation angles, and the direction showing the anisotropy is determined, based on the physical quantity measured at each rotation angle.;COPYRIGHT: (C)2008,JPO&INPIT