Hysteresis revision method of the scanning electron microscope, and hysteresis of the

摘要

PROBLEM TO BE SOLVED: To execute simple hysteresis correction with a small number of times when a material having large coersive force is used for a magnetic pole of an object lens.;SOLUTION: This method is used for automatically correcting hysteresis of the object lens of a scanning electron microscope by using software. In the hysteresis correction, the hysteresis correction is simply executed by a small number of times by considering frequency dependency of a hysteresis loop and by bringing the variation speed of magnetic field intensity of an excitation magnetic field close to the variation speed of an excitation current in manual operation. The method comprises: a step for increasing the excitation current supplied to the object lens to a predetermined excitation current value higher than that in normal use; and a process for decreasing it from the predetermined excitation current value to a target excitation current value. In the decreasing process, the variation speed of the excitation current is varied with multiple steps.;COPYRIGHT: (C)2005,JPO&NCIPI