Stabilization of the MEMS mirror in closed-loop operation

摘要

Except for jitter, apparatus and method for stabilizing a feedback system torsional hinged device is provided. Light source to the 20 on the photosensitive medium from the beam 16 is directed against the reflective surface of the rotating mirror 10. Sensors 22a, 22b provides a movement sensing signal to the control circuit 26 monitoring and controlling the drive mechanism 12. In order to introduce the movement of minor lateral direction in addition to the rotational motion, by which the vibration device 10, and provides an asymmetric drive torque 18 or applied to the device, the stabilization is achieved.