Distribution and drop on demand distribution technology of the fluid in nano- scale manufacturing technology

摘要

This invention being the method uniformity distributing the liquid of total capacity on the baseplate, the plural mutually phases which possess the unit capacity which especially, each corresponds the liquid drop which is distant will include the step which arranges with respect to the territory where it has the baseplate, it is the method of being function of capacity of the pattern which it tries that total capacity of the liquid drop inside that territory will form in that territory.