Functional liquid supply method and the functional liquid supply device to the functional liquid droplet ejecting heads, and a droplet ejection apparatus, method of manufacturing an electro-optic device

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for supplying a functional liquid capable of controlling the functional liquid supply pressure in a functional liquid drop discharge head to a predetermined pressure regardless of the pressure loss in a functional liquid flow channel to properly supply the functional liquid to the functional liquid drop discharge head from a functional liquid tank, a liquid drop discharge device, an electrooptical device and its production method, and electronic equipment.;SOLUTION: The method of supplying the functional liquid to the functional liquid drop discharge head 31 from a functional liquid supply means 221 through a supply pipeline 251, is characterized by being provided with a pressure detection process for detecting the pressure in the supply pipeline 251 at the time of driving of the functional liquid drop discharge head 31 and a regulation process for regulating the supply pressure of the functional liquid of the supply means 221 on the basis of the detection result due to the pressure detection process so that the head inner pressure of the discharge head 31 becomes constant.;COPYRIGHT: (C)2004,JPO