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Three-Dimensional, Ultrasonic Transducer Arrays, Methods of Making Ultrasonic Transducer Arrays, and Devices Including Ultrasonic Transducer Arrays
Three-Dimensional, Ultrasonic Transducer Arrays, Methods of Making Ultrasonic Transducer Arrays, and Devices Including Ultrasonic Transducer Arrays
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机译:三维超声换能器阵列,超声换能器阵列的制造方法以及包括超声换能器阵列的设备
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摘要
Medical imaging devices may comprise an array of ultrasonic transducer elements. Each transducer element may comprise a substrate having a doped surface creating a highly conducting surface layer, a layer of thermal oxide on the substrate, a layer of silicon nitride on the layer of thermal oxide, a layer of silicon dioxide on the layer of silicon nitride, and a layer of conducting thin film on the layer of silicon dioxide. The layers of silicon dioxide and thermal oxide may sandwich the layer of silicon nitride, and the layer of conducting thin film may be separated from the layer of silicon nitride by the layer of silicon dioxide.
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