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METHOD TO ACHIEVE A LOW COST TRANSISTOR ISOLATION DIELECTRIC PROCESS MODULE WITH IMPROVED PROCESS CONTROL, PROCESS COST, AND YIELD POTENTIAL
METHOD TO ACHIEVE A LOW COST TRANSISTOR ISOLATION DIELECTRIC PROCESS MODULE WITH IMPROVED PROCESS CONTROL, PROCESS COST, AND YIELD POTENTIAL
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机译:具有改进的过程控制,过程成本和屈服势的低成本晶体管隔离介电过程模块的方法
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摘要
A method of processing a semiconductor structure is provided. The method includes forming a polish stop layer over one or more features on a substrate; forming a first dielectric layer over the polish stop layer, a valley portion of the first dielectric layer being just above a top of the polish stop layer; and polishing the dielectric layer down to the top of the polish stop layer. By forming a just enough dielectric layer to allow gap-fill on the substrate and polishing the dielectric layer down to the top of the polish stop layer, the method can reduce the cost and controls associated with forming the first dielectric layer.
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