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Method for Forming Carbonaceous Material Protrusion and Carbonaceous Material Protrusion

机译:碳质材料突起的形成方法和碳质材料突起

摘要

This method of forming a carbonaceous material projection structure includes: the step of applying a resist 11 onto a diamond substrate 10; the step of forming holes 12 in the applied resist 11, the holes 12 being provided according to a predetermined arrangement, a wall 12b of each of the holes 12 being inversely tapered from an aperture 12a toward a bottom; the step of depositing a mask material through the aperture 12a to form a mask deposition 14 in each of the holes 12; the step of lifting off a mask material 13 deposited on the resist 11 together with the resist 11; and etching the diamond substrate 10 using the mask deposition 14 as a mask to form a carbonaceous material projection.
机译:这种形成碳质材料突起结构的方法包括:将抗蚀剂 11 施加到金刚石基板 10 上的步骤;在涂覆的抗蚀剂 11 中形成孔 12 的步骤,孔 12 根据预定的布置设置,壁 12每个孔 12 b 从孔 12 a 朝向底部呈反锥形;通过孔 12 a 沉积掩模材料以在每个孔 12 中形成掩模沉积 14 的步骤B>;剥离与抗蚀剂 11 一起沉积在抗蚀剂 11 上的掩模材料 13 的步骤;然后以掩模沉积 14 为掩模,对金刚石基板 10 进行蚀刻,形成碳质材料凸起。

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