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METHOD AND SYSTEM OF INTRODUCING HIERARCHY INTO DESIGN RULE CHECKING TEST CASES AND ROTATION OF TEST CASE DATA
METHOD AND SYSTEM OF INTRODUCING HIERARCHY INTO DESIGN RULE CHECKING TEST CASES AND ROTATION OF TEST CASE DATA
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机译:将层次结构引入设计规则测试案例并旋转案例数据的方法和系统
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摘要
A method and system for validating a design rule checking program. The method and system includes creating a hierarchal structure such that each layer of the hierarchal structure corresponds to a process layer of a device or subregion of a shape. The method and system further includes inserting the created hierarchical structure into a DRC program and running the DRC program at least once with hierarchical optimization options turned off. The method and system compares the expected results with actual results. The differences between the expected results and the actual results indicate errors in the DRC program
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