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Methods and systems for optical inspection of surfaces based on laser screening
Methods and systems for optical inspection of surfaces based on laser screening
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机译:基于激光筛选的表面光学检查方法和系统
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摘要
A method for imaging and an imaging system, the system includes the steps of: (i) scanning a beam of coherent radiation over a surface along a scan axis; (ii) focusing the beam to a spot on the surface, so that the spot has a predetermined dimension along the scan axis; (iii) spreading the beam laterally while scanning the beam, so that the beam covers an area substantially wider than the predetermined dimension in a direction transverse to the scan axis; and (iii) capturing the radiation scattered from the surface while scanning the beam, so as to form an image of the surface.
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