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Manufacturing Miniature Structured Elements with Tool Incorporating Spacer Elements

机译:使用结合了间隔元件的工具来制造微型结构元件

摘要

A plurality of optical elements can be manufactured by replication. A replication tool can include a plurality of replication sections having negative structural features that define the shape of the plurality of optical elements and at least one first spacer portion. A replication material can be disposed between a substrate and the replication tool. The replication tool and the substrate can be moved so that a substantially flat surface portion of each first spacer portion rests against a layer of replication material remaining between the at least one first spacer portion and the substrate. The layer of replication material keeps the at least one first spacer portion spaced from the substrate. The replication material can be hardened to form the plurality of optical elements.
机译:可以通过复制来制造多个光学元件。复制工具可以包括具有负结构特征的多个复制部分,所述负结构特征限定了多个光学元件的形状和至少一个第一间隔物部分。可以将复制材料设置在基底和复制工具之间。可以移动复制工具和衬底,使得每个第一间隔物部分的基本平坦的表面部分抵靠在至少一个第一间隔物部分和衬底之间的复制材料层上。复制材料层使至少一个第一间隔物部分与基底保持间隔。复制材料可以被硬化以形成多个光学元件。

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