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Method and apparatus for quantitative three-dimensional reconstruction in scanning electron microscopy
Method and apparatus for quantitative three-dimensional reconstruction in scanning electron microscopy
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机译:扫描电子显微镜中定量三维重建的方法和装置
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摘要
A method and an apparatus are for three-dimensional tomographic image generation in a scanning electron microscope system. At least two longitudinal marks are provided on the top surface of the sample which include an angle therebetween. In consecutive image recordings, the positions of these marks are determined and are used to quantify the slice thickness removed between consecutive image recordings.
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