首页> 外国专利> A method for preparing carbon nanotubes field emitter arrays fabricated on anodic aluminum oxide membrane bonded on silicon wafer

A method for preparing carbon nanotubes field emitter arrays fabricated on anodic aluminum oxide membrane bonded on silicon wafer

机译:一种制备在结合在硅片上的阳极氧化铝膜上的碳纳米管场致发射体阵列的方法

摘要

the present invention is a carbon nanotube field emission device manufacturing method as the film (membrane) in the form of nano-porous alumina creating a frame bonded to hydrogen bond to the silicon wafer surface and to increase the temperature in the state under pressure and bonded to a silicon wafer with nano framework with ether bond, an extension of the diameter of the pores of the nano-frame junction were formed in the pore The development of technologies for producing carbon nanotube field emission device made by using a metal nanoparticle catalyst. ; said bonded alumina after filling the other metal ion concentration in the pore solution and the acid solution was extended with the diameter of the pores of the nano-mold by evaporation of a predetermined size and a nanoparticle catalyst in the form is prepared, and a method for controlling the diameter of the carbon nanotubes by using this. ; application of the carbon nanotube as an electron emission source of field emission devices of the tip to form an excellent field emission device can be implemented.
机译:本发明是一种碳纳米管场致发射器件的制造方法,其为纳米多孔氧化铝形式的膜(膜),其形成键合以与硅晶片表面氢键键合并在加压和粘合状态下提高温度的框架在具有带有醚键的纳米框架的硅晶片上,在孔中形成了纳米框架结的孔的直径的延长。通过使用金属纳米粒子催化剂制造碳纳米管场致发射装置的技术发展。 ;所述键合的氧化铝在将其他金属离子浓度填充到孔溶液和酸溶液中之后,通过蒸发预定尺寸使纳米模具的孔的直径扩大,并制备该形式的纳米颗粒催化剂,并且该方法通过使用它来控制碳纳米管的直径。 ;可以实现将碳纳米管用作尖端的场致发射器件的电子发射源以形成优良的场致发射器件。

著录项

  • 公开/公告号KR100779141B1

    专利类型

  • 公开/公告日2007-11-23

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20050104029

  • 发明设计人 서정쌍;정현영;정성미;

    申请日2005-11-01

  • 分类号H01J1/30;

  • 国家 KR

  • 入库时间 2022-08-21 19:54:34

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号