首页> 外国专利> Apparatus for manufacturing poly crystaline silicon ingot for solar battery

Apparatus for manufacturing poly crystaline silicon ingot for solar battery

机译:用于太阳能电池的多晶硅锭的制造设备

摘要

An apparatus for manufacturing a poly crystalline silicon ingot for a solar cell is provided to uniformly grow silicon crystalline from a lower direction to an upper direction. An apparatus for manufacturing a poly crystalline silicon ingot for a solar cell includes a vacuum chamber(100), a crucible(200), a susceptor(210), a support frame, heaters(310,320), an adiabatic plate, a door, a cooling plate, a cooling plate support shaft, a conveying means, temperature sensors(610,620), and a controller. The crucible is installed in the vacuum chamber. The susceptor wraps to protect the crucible. The support frame supports the susceptor. The heater applies heat to melt a silicon material in the crucible. The adiabatic plate is spaced apart from a lower side of the susceptor. The door opens and closes a hole of the adiabatic plate. The cooling plate is attached to a lower side of the susceptor. A coolant path is formed inside the cooling plate shaft. The cooling plate conveying means conveys the cooling plate and the cooling plate shaft. The temperature sensors sense a temperature in the crucible. The controller controls a temperature in the crucible.
机译:提供一种用于制造用于太阳能电池的多晶硅锭的设备,以从下方向到上方向均匀地生长晶体硅。用于制造用于太阳能电池的多晶硅锭的设备包括真空室(100),坩埚(200),基座(210),支撑框架,加热器(310,320),绝热板,门,冷却板,冷却板支撑轴,输送装置,温度传感器(610,620)和控制器。坩埚安装在真空室内。基座包裹起来以保护坩埚。支撑框架支撑基座。加热器施加热量以熔化坩埚中的硅材料。绝热板与基座的下侧间隔开。门打开和关闭绝热板的孔。冷却板附接到基座的下侧。在冷却板轴的内部形成有冷却水路径。冷却板输送装置输送冷却板和冷却板轴。温度传感器感测坩埚中的温度。控制器控制坩埚中的温度。

著录项

  • 公开/公告号KR100852686B1

    专利类型

  • 公开/公告日2008-08-19

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20070006218

  • 发明设计人 김민순;문상진;소원욱;

    申请日2007-01-19

  • 分类号H01L31/04;C30B15/20;

  • 国家 KR

  • 入库时间 2022-08-21 19:51:42

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号