METHOD AND EQUIPMENT FOR MANUFACTURING ALUMINUM NITRIDE BULK SINGLE CRYSTAL

摘要

The invention early due to obtain the threshold by using the ammonia bulk single crystals of aluminum nitride, to form a supercritical solvent containing alkali metal ions in the autoclave, and, here, to dissolve the feedstock to produce a supercritical solution in, and simultaneously or it is to separately determine the gallium-containing nitride on the seed surface. The method is carried out using an autoclave (1) for producing a supercritical solvent, a convection management apparatus 2 is installed. The autoclave is put in a furnace unit (4) having a heating device (5) or the cooling unit (6).; Supercritical solution, crystals