首页> 外国专利> SEED AND SEEDHOLDER COMBINATIONS FOR HIGH QUALITY GROWTH OF LARGE SILICON CARBIDE SINGLE CRYSTALS

SEED AND SEEDHOLDER COMBINATIONS FOR HIGH QUALITY GROWTH OF LARGE SILICON CARBIDE SINGLE CRYSTALS

机译:高质量的大型碳化硅单晶的种子和种子持有者组合

摘要

It provides a method associated with the system using the sublimation growth of silicon carbide seed. The system includes a crucible; Silicon carbide raw material composition located within the crucible; Seed holder located within the crucible (seed holder); A silicon carbide seed crystal located on said seed holder; For the vapor transfer to the seed crystal from the source material, and this ju growth direction within the furnace it comprises means for generating a main heat gradient set so that between the raw material composition and the seed crystal, the seed crystal is , macroscopic growth surface of said main column and a gradient of 70 degrees to form a 89.5 degree angle with respect to the main direction of growth, and on the crystallographic orientation (crystallographic orientation) of the seed crystal in the seed crystal is the c- axis of the crystal the main thermal gradients and to the state about 0 degrees to 2 degrees with the angle, characterized in that positioned on the seed holder.
机译:它提供了一种使用升华生长碳化硅种子的系统相关方法。该系统包括坩埚;位于坩埚内的碳化硅原料成分;种子架位于坩埚内(种子架);碳化硅晶种,位于所述晶种支架上;为了将蒸汽从原料转移到晶种,并在炉内这种生长方向,它包括产生主热梯度设定的装置,以便在原料组成和晶种之间,晶种是宏观生长的。所述主柱的表面以70度的梯度相对于主生长方向形成89.5度的角度,并且在籽晶中的籽晶的晶体学取向(晶体学取向)为晶体的c轴。晶体的主要热梯度和状态以约0度到2度的角度变化,其特征在于位于晶种支架上。

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