Wafer gripper, has guide for gripper jaw fastened to rotor that is supported rotatably about rotational axis of another rotor, where rotary drive of latter rotor is controlled or reversed in dependence of rotation of former rotor

摘要

The gripper (1) has a gripper jaw (4) movable in a guide (2) for gripping a wafer, and a rotor (5) for opening and closing the gripper jaw. The rotor has an eccentrically running guide for the gripper jaw. The guide for the gripper jaw is fastened to another rotor (15) that is supported rotatably about a rotational axis (7) of the rotor (5), where a rotary drive (6) of the rotor (5) is controlled or reversed in dependence of the rotation of the rotor (15) in particularly for a rotation in a same or opposite direction. An independent claim is also included for a method for controlling a wafer gripper.