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vertical positioning of an optoelectronic device on a vehicle in relation to a, in this institution of integrated optical head
vertical positioning of an optoelectronic device on a vehicle in relation to a, in this institution of integrated optical head
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机译:在这种集成光学头机构中,光电子设备在车辆上相对于a的垂直定位
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摘要
The support includes a lower confinement layer (101) of silica deposited on a silicon base layer (100) and covered by a core (102). The layers are etched to reveal the rough outline of the optical guides and a sacrificial stop layer is deposited on the preceding layers and etched away except on support zones. The upper confinement layer (120) is then deposited and etched to form the guides (124, 126). The stop layer is then removed to reveal the support zones which position the component (130). The zones are, dependent on the manufacturing, at one of the following levels: the top of the core, an intermediate plane between the base and top of the core, the top of the lower confinement layer, or an intermediate plane in the lower confinement layer.
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