'Method and device for machining a target by femtosecond laser beam.'

摘要

The present invention is to take advantage of the deterministic nature of the ablation threshold and its non-linear dependence by using pupil, phase or amplitude filtering techniques, by polarizing effect or any other technique to significantly reduce the machining dimensions obtained by focussing a laser beam in nanotechnologies. Such filtering alters the intensity distribution in the focal plane so as to thin the maximum of the central component of the laser pulse spectrum while keeping the bright rings lower than the deterministic ablation threshold. The present invention associates, in particular, the deterministic threshold femtosecond ablation technique and the apodization technique.