INSPECTION DEVICE, FAILURE ANALYSIS SYSTEM, AND FAILURE ANALYSIS METHOD

摘要

PROBLEM TO BE SOLVED: To provide a failure analysis method capable of reducing an inspection cost and also improving the failure analyzing accuracy.;SOLUTION: An electrical performance test is carried out for memory cells of a semiconductor storage device having a plurality of blocks which include first to n-th wordlines (n is integer≥4) and a plurality of memory cells arranged on intersections between the first to n-th wordlines and a plurality of bit lines, and the test results about the n-2 pieces of memory cells corresponding to 2 to (n-1)th wordlines on the same bit line are condensed to m pieces (m is integer satisfying 1≤m≤n-3), and a condensed fail bit map is developed, of which the test results corresponding to the first wordline and the n-th wordline and the test results of condensed m pieces are mapped, then, failure modes generated in the semiconductor storage device are classified in accordance with the number of pieces of defective bit appeared in the condensed fail bit map, the shapes and the appeared places.;COPYRIGHT: (C)2009,JPO&INPIT