ARC PLASMA VAPOR-DEPOSITION APPARATUS AND ARC PLASMA VAPOR-DEPOSITION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an arc plasma vapor-deposition apparatus which can produce a metal catalyst having a high carrying density and a fine particle diameter, and to provide an arc plasma vapor-deposition method.;SOLUTION: The arc plasma vapor-deposition apparatus 100A includes: an arc plasma-generating device composed of a power source 20 and an arc vapor-deposition source 10; a decompression vessel 8 which communicates with the arc plasma-generating device and also accommodates or mounts a material to be vapor-deposited thereon therein, and of which the inside is controlled to a decompressed atmosphere; and a cooling device 80 for cooling the material to be vapor-deposited thereon; and irradiates the material to be vapor-deposited thereon with the arc plasma having a peak energy of approximately 30 eV.;COPYRIGHT: (C)2009,JPO&INPIT