首页>
外国专利>
Micromachines and nanomachines for testing the physical properties of micro- and nano-sized material samples that actuate internal stresses
Micromachines and nanomachines for testing the physical properties of micro- and nano-sized material samples that actuate internal stresses
展开▼
机译:微型机器和纳米机器,用于测试驱动内部应力的微米和纳米材料样品的物理特性
展开▼
页面导航
摘要
著录项
相似文献
摘要
This invention provides an internal stress actuated micro- or nano-machine for measuring mechanical and/or electrical properties, e.g. traction measurement, compression measurement or shear measurement, on micro-scale and nano-scale films or multi-layers of materials such as metallic materials, carbon-based materials and silicon-base materials. The device of the invention has applications in materials production industry, as well as in micro-electronics and for surface treatments and functionalization.
展开▼