EVALUATION METHOD AND EVALUATION DEVICE FOR PHYSICAL PROPERTY OF THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a variable pressure/temperature polarization analysis/measurement method aimed at finding physical properties such as the film thickness L, refractive index n, extinction coefficient k, etc. of a thin-film specimen at specific pressure and temperature by measuring polarization parameters (Ψ, Δ) of the specimen while continuously changing the temperature of the thin-film specimen in a wide range, thereby evaluating the quantity, size, specific surface area, and thermal expansion coefficient, of nano-holes, and thermo-optical characteristics, etc. accompanying decomposition/desorption.;SOLUTION: As to a polarization analyzer, a specimen is disposed in a specimen evaluation chamber provided with an optically transparent window. The window is provided with an optical surface which remains vertical to incident light applied to the specimen mounted on a specimen table even if the pressure and temperature of gas are changed in the evaluation chamber, and an optical surface which remains vertical to reflected light reflected from the specimen even if temperature is changed. It is thereby made possible to find the refractive index, extinction coefficient, or film thickness of the specimen at various temperatures in a prescribed atmosphere having various pressures.;COPYRIGHT: (C)2009,JPO&INPIT