FIELD EMISSION TYPE ELECTRON GUN, AND ELECTRON BEAM APPLICATION DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a field emission type electron gun having a heat resistant joint portion between a fibrous carbon material resistant to heat flushing and a conductive substrate, and to provide an electron beam application device using the same.;SOLUTION: The field emission type electron gun comprises the fibrous carbon material, the conductive substrate supporting the fibrous carbon material, a heating device for heating the fibrous carbon material, a drawing device for field-emitting electrons from the fibrous carbon material, and an accelerator for accelerating the electrons. In part of a contact portion between the fibrous carbon material and the conductive substrate, a first conductive coat layer is formed as a high-melting-point material to form carbide or solid solution. A second coat layer formed of carbon is also provided encircling the conductive coat layer, the contact portion between the fibrous carbon material and the conductive substrate, and a protruded portion of the conductive substrate excluding the front end of the fibrous carbon material. The field emission type electron gun is applied to various kinds of electron beam application devices.;COPYRIGHT: (C)2009,JPO&INPIT