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The production mannered null electrode of the discharge lamp and the discharge container which possess the discharge container and the said discharge container possessing
The production mannered null electrode of the discharge lamp and the discharge container which possess the discharge container and the said discharge container possessing
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机译:具有放电容器的放电灯和放电容器的制造方式为空的电极,并且所述放电容器具有
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摘要
PROBLEM TO BE SOLVED: To provide a discharge vessel having an excimer filler including at least one kind of rare gas and halogen for forming excimer together under an operation condition of a gap, an electrode, and a lamp, and manufactured from quartz glass. ;SOLUTION: In this discharge vessel, an inner wall of the discharge vessel is completely covered with an inactivation layer of oxide formed of at least one of metallic Al, Hf, Y or Sc, and in that case, the layer has an amorphous structure, and the thickness of the whole layer is 20 to 500 nm. Thus, even if a highly offensive filler is used, the superior discharge vessel having the long service life can be obtained.;COPYRIGHT: (C)2003,JPO
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