Characteristic measuring method of the suffering measurement component and characteristic measuring method of the suffering

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor device capable of correctly grasping the characteristic fluctuation of an element due to process condition or the like while suppressing the increase of chip area at minimum.;SOLUTION: In the semiconductor device, a plurality of series circuits constituted of conduction elements 121a, 122a and elements to be measured 121b, 122b are provided between a power supply potential VDD and a ground potential VSS. A test signal TEST is commonly supplied to the conduction elements 121a, 122a while election signals S1, S2 corresponding to the conduction elements, are supplied individually. Then, a mode is set so that the power consumption of a main circuit section comprised in the semiconductor device becomes zero or substantially a constant and, thereafter, the elements 121b, 122b to be measured are conducted sequentially to sequentially measure the power supply current, which is made to flow through the semiconductor device under this condition. According to this method, correctly knowing power consumption of the element to be measured becomes possible and, based on the correct acknowledgement, knowing characteristics of the element to be measure becomes possible.;COPYRIGHT: (C)2008,JPO&INPIT