Microelectromechanical gyroscope with self-test function and control method of a microelectromechanical gyroscope

摘要

A microelectromechanical gyroscope includes a microstructure (102), comprising a first mass (107) and a second mass (108), wherein the first mass (107) is oscillatable according to a first axis (X) and the second mass (108) is constrained to the first mass (107) so as to be drawn along by the first mass (107) according to the first axis (X) and to oscillate according to a second axis (Y), in response to a rotation (Ω) of the microstructure (102). A driving device (103) is coupled to the microstructure (102) to maintain the first mass (107) in oscillation at the driving frequency (ωR), and a reading device (104) detects displacements of the second mass (108) according to the second axis (Y). The gyroscope is provided with a self-test actuation system (6d, 6e, 6h, 106) coupled to the second mass (108) for applying an electrostatic force (FE) at the driving frequency (ωR) so as to move the second mass (108) according to the second axis (Y).