MANUFACTURING METHOD OF DIAMOND LIKE CARBON FILMS DOPED WITH THE THIRD ELEMENTS

摘要

A manufacturing method of a carbon thin film of a diamond form which is added a third element is provided to gain easiness of a control by doping a metal material into a diamond form on a hard carbon thin film. A manufacturing method of a carbon thin film of a diamond form which is added a third element comprises the following steps. A substrate holder(2) is installed inside the vacuum chamber(1). A doping material mesh(4) is connected to high frequency power. A guide tube(5) is arranged between electro magnets(6). A micro wave generator(7) is connected to a guide tube. Inside of a vacuum forms a vacuum. A surface of substrate is purified by generating ECR(Electron Cyclotron Resonance) plasma. The doping material is doped on the substrate(3) by authorizing the high frequency power(9) of 300W on the doping material mesh. And the carbon thin film of the diamond form is formed.