CASSETTE USED PRODUCTING CARBON NANO TUBE AND SYNTHESIZING SUBSTRATE LOADING METHOD FOR THE CASSETTE

摘要

A cassette for producing a carbon nano tube and a synthesizing substrate loading method in the cassette are provided to prevent the carbon nano tube from being separated due to the impact by using a buffering block. A cassette(420) includes support units part, an upper plate, a lower plate, and vertical axes. The upper plate and lower plate are formed with a rectangular shape. The vertical axes connect the edge region where the upper plate and the lower face each other. Support units supporting a synchronizing substrate(10) are installed in the vertical axes. The support units are divided into two groups. The support units belonging to the first group support the synthesizing substrate to be loaded to a reaction chamber. The support units belonging to the second group support the synthesizing substrate unloaded from the reaction chamber. The first support units are positioned in the upper part of the second support units.