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MICRO OR NANOFLUIDIC CHIP HAVING PDMS THIN COATED-NOA CHANNEL AND MANUFACTURE METHOD THEREOF
MICRO OR NANOFLUIDIC CHIP HAVING PDMS THIN COATED-NOA CHANNEL AND MANUFACTURE METHOD THEREOF
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机译:具有薄涂层NOA通道的PDMS的微或纳米流芯片及其制造方法
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摘要
A micro or nano fluid chip consisting of NOA channels including a thin PDMS layer and a manufacturing method of the same are provided to flow the fluid within the channel of the fluid chip as the capillary phenomena. A micro or nano fluid chip comprises a channel(103) and a thin PDMS layer(105). The channel is comprised of a NOA(norland optical adhesive). The thin PDMS layer is piled on the channel. The thin PDMS layer is finished with the oxygen plasma. A cover layer(107) is formed on the side of the thin PDMS layer. A SAM layer(self assembled monolayers, 104) is formed on the lower part of the thin PDMS layer.
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