APPARATUS FOR MEASUREMENT OF THREE-DIMENSIONAL SHAPE USING POLYGON MIRROR AND DUAL MIRROR, AND METHOD FOR MEASUREMENT OF THREE-DIMENSIONAL SHAPE USING THE SAME

摘要

This invention is in the measured object having a three-dimensional shape that is the shadow region is formed with respect to the incident light by the extrusion by irradiating the pattern light in different directions with respect, to a three-dimensional shape measuring apparatus and a measuring method using the same using a rotary polygon mirror dual lapse that can obtain a highly accurate image without a shadow area. ; three-dimensional shape measurement device using a rotary polygon mirror of the present invention a dual passage therefor will lapse rotary polygon having a plurality of reflecting surfaces for projecting a pattern light to the measured object by reflecting the light incident through the rotation, the rotation if both sides respect a pair of light sources and, a light path recognition means receiving light reflected from the reflective surface if the rotation respect to the optical path caused by recognizing a synchronization signal is provided for irradiating light to the reflective surface if the rotation in the respect, in the light path In synchronization with the synchronization signal generated from the recognition means and control means for controlling the phase and period of the linear streaks by adjusting the blinking period of the light source, the three-dimensional shape including a light detecting device for picking up the light reflected from the measured object surface In the measurement device, if the rotation is provided on each side and a dual mirror respect to the projection on the object measured by reflecting the light reflected from the reflective surface if the rotation of Sir.