The present invention is the substrate transfer apparatus and a plurality of process modules relates to a program for interference countermeasure in the failure countermeasure method and a substrate carrying apparatus in the substrate transport apparatus that performs the processing on the wafer (20-23, 40) and, the wafer (W) and transport module (31-34), and the evacuation module 30 which cane wafers between a transport module for transporting, and detecting a failure occurs in the processing module, on the basis of the detection signal process modules having a CPU (60) for controlling a whole of each module, and is at the same time as transport when detecting a failure occurs in any process module by the control of the wafer carrying the process module has faulted in the save module failure occurs is once stopped before the transport of the follow-up of the wafer and the transport, the process of the wafer of the other and provides a technology for performing the conveyance, processing of the wafer before the process module after fault has occurred.
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