BEAM INCIDENT ANGLE DETECTION SENSOR UNIT, BEAM INCIDENT ANGLE MEASUREMENT UNIT, BEAM INCIDENT ANGLE DETECTOR, AND MOVING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a small and lightweight beam incident angle detection sensor unit capable of accurately detecting a beam incident angle; a beam incident angle measurement unit; a beam incident angle detector; and a moving device.;SOLUTION: A first beam shielding layer body shielding a beam includes a first beam shielding layers 11C formed with first slits 11Cb each allowing a beam to enter therein; and a second beam shielding layer body arranged oppositely to the first beam shielding layer 11C by being spaced at a predetermined distance includes a second beam shielding layer 12 formed with second slits 12Cb at positions relatively shifted with respect to the first slits 11Cb in the lateral direction along its planar direction, and a sensor layer 13C having a sensor element detecting beams entered from the first and second slits 11Cb and 12Cb.;COPYRIGHT: (C)2010,JPO&INPIT