METHOD AND APPARATUS FOR PRODUCING REACTIVE SPECIES AND METHOD AND APPARATUS FOR PERFORMING TREATMENT BY USING REACTIVE SPECIES

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for producing reactive species, wherein an influence of a charged particle such as an ionic species can be avoided and to provide a method and an apparatus for performing treatment by using the reactive species.;SOLUTION: The apparatus for producing reactive species is provided with: a first reaction vessel 11 for exciting a rare gas 1 to produce an excited species; a powder source 12 and an electrode 13 which are used for generating plasma in the first reaction vessel 11; a grounded mesh 14 for restraining the charged particles, which are produced when the rare gas 1 is excited in the first reaction vessel 11, from leaking to the outside of the first reaction vessel 11; a flow path for transferring the rare gas 1 excited in the first reaction vessel 11; a second reaction vessel 16 where the excited rare gas 1 and a process gas 3 are mixed; and a process gas supply flow path 15 for introducing a process gas 3 into a process zone 4. In the process zone 4, the reactive species, which has the life shorter than that of the excited rare gas 1, is produced from the process gas 3 by using the excited rare gas 1.;COPYRIGHT: (C)2011,JPO&INPIT