METHOD FOR ANALYSIS OF COMPOSITION OF PHOTOSENSITIVE RESIN COPOLYMER USING FOURIER TRANSFORM NEAR-INFRARED SPECTROSCOPY

摘要

PROBLEM TO BE SOLVED: To provide a method for analysis of composition of a photosensitive resin copolymer using Fourier Transform Near-Infrared Spectroscopy (FT-NIR).;SOLUTION: In the analysis method, a calibration curve to each monomer is formed from a mixture acquired by mixing two or more kinds of monomers at various ratios by analysis using the Fourier Transform Near-Infrared Spectroscopy (FT-NIR), and then a value acquired by FT-NIR analysis of the photosensitive resin copolymer to be analyzed including two or more kinds of monomers is substituted for the calibration curve, to thereby calculate a copolymer composition. According to the analysis method, a monomer composition in the photosensitive resin copolymer for photoresist acquired by mixing various monomers can be analyzed more conveniently with reproducibility.;COPYRIGHT: (C)2010,JPO&INPIT