VACUUM HEATING DEVICE AND VACUUM HEATING TREATMENT METHOD

摘要

PPROBLEM TO BE SOLVED: To provide a vacuum heating device and a vacuum heating treatment method having a simple configuration and enabling opening of a vacuum tank to the atmosphere in a short time by effectively cooling a heating furnace. PSOLUTION: The vacuum heating device 1 includes the vacuum tank 10; an air exhaust means 20 enabling air exhaust of the inner part 10a of the vacuum tank 10 to the vacuum atmosphere; the heating furnace 31 provided in the inner part 10a of the vacuum tank 10 and storing a treated object W; a heating means 33 for heating the treated object W stored in the heating furnace 31; and an air sending means 50 for blowing inert gas G toward the heating furnace 31. PCOPYRIGHT: (C)2010,JPO&INPIT