Exposure apparatus, exposure amount control method, exposure amount control program and its recording medium

摘要

PPROBLEM TO BE SOLVED: To provide an exposure device capable of suitably controlling a cumulative exposure amount to a substrate, even if the measurement precision of light volume detection means for controlling an exposure amount is deteriorated. PSOLUTION: There are provided an integrator 21 detecting a light volume of an exposure light, and an illuminance sensor 12 detecting the illuminance of the exposure light irradiated to a substrate stage 11. Based on a detection result of the integrator 21, the opening and closing timing of a shutter 25 is controlled by a shutter drive 45 so that the cumulative exposure amount on the substrate stage 11 may become an exposure amount set beforehand. Moreover, the detection error of the integrator 21 is computed by an error calculator 48 on the basis of a detection result of illuminance sensor 12. When the computed detection error exceeds a tolerance set beforehand, in order to set the exposure amount controlled based on the detection result of the integrator 21 as the exposure amount necessary for obtaining a predetermined resist line width, a correction value to the set point of the exposure amount is computed by a correction value calculator 49, and consequently the set point of the exposure amount is corrected. PCOPYRIGHT: (C)2006,JPO&NCIPI